?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Dau%2C+Van+Thanh&rft.aulast=Dau&rft.aufirst=Van+Thanh&rft.issue=7&rft.volume=23&rft.date=July+2013&rft.atitle=A+micromirror+with+CNTs+hinge+fabricated+by+the+integration+of+CNTs+film+into+a+MEMS+actuator&rft.title=Journal+of+Micromechanics+and+Microengineering&rft.pages=075024&rft.genre=article