relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/838/
title: A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
creator: Dau, Van Thanh
creator: Bui, Thanh Tung
creator: Dinh, Xuan Thien
creator: Dao, Viet Dzung
creator: Yamada, Takeo
creator: Hata, Kenji
creator: Sugiyama, Susumu
subject: Electronics and Communications
subject: Electronics and Computer Engineering
publisher: IOP Publishing
date: 2013-07
type: Article
type: PeerReviewed
identifier:   Dau, Van Thanh and Bui, Thanh Tung and Dinh, Xuan Thien and Dao, Viet Dzung and Yamada, Takeo and Hata, Kenji and Sugiyama, Susumu  (2013) A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator.  Journal of Micromechanics and Microengineering, 23  (7).   075024.      
relation: http://dx.doi.org/10.1088/0960-1317/23/7/075024