%0 Journal Article
%A Dau, Van Thanh
%A Bui, Thanh Tung
%A Dinh, Xuan Thien
%A Dao, Viet Dzung
%A Yamada, Takeo
%A Hata, Kenji
%A Sugiyama, Susumu
%D 2013
%F SisLab:838
%I IOP Publishing
%J Journal of Micromechanics and Microengineering
%N 7
%P 075024
%T A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/838/
%V 23