<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator"^^ . "2013-07" . "23" . "7" . . "IOP Publishing"^^ . . . "Journal of Micromechanics and Microengineering"^^ . . . . . . . . . . . . . . . . . . . . . . . . . . "Thanh Tung"^^ . "Bui"^^ . "Thanh Tung Bui"^^ . . "Van Thanh"^^ . "Dau"^^ . "Van Thanh Dau"^^ . . "Takeo"^^ . "Yamada"^^ . "Takeo Yamada"^^ . . "Viet Dzung"^^ . "Dao"^^ . "Viet Dzung Dao"^^ . . "Kenji"^^ . "Hata"^^ . "Kenji Hata"^^ . . "Susumu"^^ . "Sugiyama"^^ . "Susumu Sugiyama"^^ . . "Xuan Thien"^^ . "Dinh"^^ . "Xuan Thien Dinh"^^ . . . . . "HTML Summary of #838 \n\nA micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator\n\n" . "text/html" . . . "Electronics and Communications"@en . . . "Electronics and Computer Engineering"@en . .