TY  - JOUR
ID  - SisLab838
UR  - http://dx.doi.org/10.1088/0960-1317/23/7/075024
IS  - 7
A1  - Dau, Van Thanh
A1  - Bui, Thanh Tung
A1  - Dinh, Xuan Thien
A1  - Dao, Viet Dzung
A1  - Yamada, Takeo
A1  - Hata, Kenji
A1  - Sugiyama, Susumu
Y1  - 2013/07//
PB  - IOP Publishing
JF  - Journal of Micromechanics and Microengineering
VL  - 23
TI  - A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
AV  - none
ER  -