%A Van Thanh Dau
%A Thanh Tung Bui
%A Xuan Thien Dinh
%A Viet Dzung Dao
%A Takeo Yamada
%A Kenji Hata
%A Susumu Sugiyama
%J Journal of Micromechanics and Microengineering
%T A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
%N 7
%P 075024
%V 23
%D 2013
%I IOP Publishing
%L SisLab838