eprintid: 838
rev_number: 7
eprint_status: archive
userid: 5
dir: disk0/00/00/08/38
datestamp: 2016-05-30 05:42:43
lastmod: 2016-05-30 05:43:47
status_changed: 2016-05-30 05:42:43
type: article
metadata_visibility: show
creators_name: Dau, Van Thanh
creators_name: Bui, Thanh Tung
creators_name: Dinh, Xuan Thien
creators_name: Dao, Viet Dzung
creators_name: Yamada, Takeo
creators_name: Hata, Kenji
creators_name: Sugiyama, Susumu
creators_id: tungbt@vnu.edu.vn
creators_id: thien@cfd.ritsumei.ac.jp
title: A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
ispublished: pub
subjects: ECE
subjects: ElectronicsandComputerEngineering
divisions: fac_fet
date: 2013-07
date_type: published
publisher: IOP Publishing
official_url: http://dx.doi.org/10.1088/0960-1317/23/7/075024
full_text_status: none
publication: Journal of Micromechanics and Microengineering
volume: 23
number: 7
pagerange: 075024
refereed: TRUE
citation:   Dau, Van Thanh and Bui, Thanh Tung and Dinh, Xuan Thien and Dao, Viet Dzung and Yamada, Takeo and Hata, Kenji and Sugiyama, Susumu  (2013) A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator.  Journal of Micromechanics and Microengineering, 23  (7).   075024.