@inproceedings{SisLab842,
       booktitle = {International Symposium on Frontiers of Materials Science},
           month = {November},
           title = {Investigation of the applicability of parylene-HT as a dielectric layer for interconnections in 3D integration system},
          author = {Thanh Tung Bui and Naoya Watanabe and Xiaojin Cheng and Fumiki Kato and Katsuya Kikuchi and Masahiro Aoyagi},
            year = {2013},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/842/}
}