?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Bui%2C+Thanh+Tung&rft.aulast=Bui&rft.aufirst=Thanh+Tung&rft.date=November+2013&rft.title=Investigation+of+the+applicability+of+parylene-HT+as+a+dielectric+layer+for+interconnections+in+3D+integration+system&rft.genre=proceeding