TY  - CONF
ID  - SisLab842
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/842/
A1  - Bui, Thanh Tung
A1  - Watanabe, Naoya
A1  - Cheng, Xiaojin
A1  - Kato, Fumiki
A1  - Kikuchi, Katsuya
A1  - Aoyagi, Masahiro
Y1  - 2013/11//
TI  - Investigation of the applicability of parylene-HT as a dielectric layer for interconnections in 3D integration system
AV  - none
M2  - Hanoi, Vietnam
T2  - International Symposium on Frontiers of Materials Science
ER  -