%A Thanh Tung Bui
%A Naoya Watanabe
%A Xiaojin Cheng
%A Fumiki Kato
%A Katsuya Kikuchi
%A Masahiro Aoyagi
%T Investigation of the applicability of parylene-HT as a dielectric layer for interconnections in 3D integration system
%C Hanoi, Vietnam
%D 2013
%L SisLab842