?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Tran%2C+Duc+Tan&rft.aulast=Tran&rft.aufirst=Duc+Tan&rft.date=2008&rft.issn=1531-636X&rft.atitle=Streamlining+the+Design+of+MEMS+Devices%3A+An+Acceleration+Sensor&rft.title=IEEE+Circuits+and+Systems+Magazine&rft.genre=article