eprintid: 85
rev_number: 12
eprint_status: archive
userid: 12
dir: disk0/00/00/00/85
datestamp: 2015-11-12 07:33:43
lastmod: 2015-11-12 07:34:44
status_changed: 2015-11-12 07:33:43
type: article
metadata_visibility: show
creators_name: Tran, Duc Tan
creators_id: tantd@vnu.edu.vn
title: Streamlining the Design of MEMS Devices: An Acceleration Sensor
ispublished: pub
subjects: ECE
subjects: ElectronicsandComputerEngineering
subjects: isi
divisions: fac_fet
abstract: A synthesis and optimization process is proposed and applied to the design of a specific MEMS device, namely an acceleration sensor. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). A three degrees-of-freedom piezoresistive acceleration sensor was designed to validate the proposed design flow. During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. In the latter, the piezoresistance effect was employed in sensing the acceleration in three dimensions.
date: 2008
date_type: published
publisher: IEEE
full_text_status: public
publication: IEEE Circuits and Systems Magazine
refereed: TRUE
issn: 1531-636X
citation:   Tran, Duc Tan  (2008) Streamlining the Design of MEMS Devices: An Acceleration Sensor.  IEEE Circuits and Systems Magazine .    ISSN 1531-636X     
document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/85/1/IEEE_thayTUE.pdf
document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/85/2/IEEE_thayTUE.pdf