%0 Journal Article
%@ 1726-5479
%A Tran, Duc Tan
%D 2012
%F SisLab:86
%I International Frequency Sensor Association
%J Sensors & Transducers
%T A Piezoresistive Acceleration Sensor: from System to Physical Levels
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/86/
%X In this paper, we focus to design and simulation of a piezoresistive accelerometer using   three different soft-wares corresponding to three different levels: system, device, and physical ones. At   the system level, MATLAB software was utilized to model a simple mechanical damping system. At   the device level, we have used SUGAR/MATLAB to investigate  the basic behaviors of 3-DOF   accelerometer. Consequently, the ANSYS finite-element software has been used to design and   simulate the advance properties of a 3-DOF piezoresistive accelerometer. At this level, we would also   perform optimization process for the fabrication step.