%A Duc Tan Tran
%J Sensors & Transducers
%T A Piezoresistive Acceleration Sensor: from System to Physical Levels
%X In this paper, we focus to design and simulation of a piezoresistive accelerometer using 
three different soft-wares corresponding to three different levels: system, device, and physical ones. At 
the system level, MATLAB software was utilized to model a simple mechanical damping system. At 
the device level, we have used SUGAR/MATLAB to investigate  the basic behaviors of 3-DOF 
accelerometer. Consequently, the ANSYS finite-element software has been used to design and 
simulate the advance properties of a 3-DOF piezoresistive accelerometer. At this level, we would also 
perform optimization process for the fabrication step.
%D 2012
%I International Frequency Sensor Association
%L SisLab86