eprintid: 86 rev_number: 14 eprint_status: archive userid: 12 dir: disk0/00/00/00/86 datestamp: 2015-11-12 07:34:57 lastmod: 2017-01-02 10:27:20 status_changed: 2017-01-02 10:27:20 type: article metadata_visibility: show creators_name: Tran, Duc Tan creators_id: tantd@vnu.edu.vn title: A Piezoresistive Acceleration Sensor: from System to Physical Levels ispublished: pub subjects: ECE subjects: ElectronicsandComputerEngineering subjects: isi divisions: fac_fet abstract: In this paper, we focus to design and simulation of a piezoresistive accelerometer using three different soft-wares corresponding to three different levels: system, device, and physical ones. At the system level, MATLAB software was utilized to model a simple mechanical damping system. At the device level, we have used SUGAR/MATLAB to investigate the basic behaviors of 3-DOF accelerometer. Consequently, the ANSYS finite-element software has been used to design and simulate the advance properties of a 3-DOF piezoresistive accelerometer. At this level, we would also perform optimization process for the fabrication step. date: 2012 date_type: published publisher: International Frequency Sensor Association full_text_status: public publication: Sensors & Transducers refereed: TRUE issn: 1726-5479 citation: Tran, Duc Tan (2012) A Piezoresistive Acceleration Sensor: from System to Physical Levels. Sensors & Transducers . ISSN 1726-5479 document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/86/1/fullpaper_sensor_transducer_2012.pdf