?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Tran%2C+Duc+Tan&rft.aulast=Tran&rft.aufirst=Duc+Tan&rft.date=2005&rft.atitle=M%C3%B4+ph%E1%BB%8Fng+c%E1%BA%A3m+bi%E1%BA%BFn+gia+t%E1%BB%91c+MEMS+ki%E1%BB%83u+t%E1%BB%A5&rft.title=Journal+of+Science%2C+Vietnam+National+University%2C+Hanoi&rft.genre=article