relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/94/ title: Mô phỏng cảm biến gia tốc MEMS kiểu tụ creator: Tran, Duc Tan subject: Electronics and Communications subject: Electronics and Computer Engineering date: 2005 type: Article type: PeerReviewed format: application/pdf language: en identifier: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/94/1/VNU2005.PDF identifier: Tran, Duc Tan (2005) Mô phỏng cảm biến gia tốc MEMS kiểu tụ. Journal of Science, Vietnam National University, Hanoi .