TY  - JOUR
ID  - SisLab94
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/94/
A1  - Tran, Duc Tan
Y1  - 2005///
JF  - Journal of Science, Vietnam National University, Hanoi
TI  - Mô ph?ng c?m bi?n gia t?c MEMS ki?u t?
AV  - public
ER  -