eprintid: 94 rev_number: 9 eprint_status: archive userid: 12 dir: disk0/00/00/00/94 datestamp: 2012-12-26 05:41:36 lastmod: 2013-06-29 04:32:36 status_changed: 2012-12-26 05:41:36 type: article metadata_visibility: show creators_name: Tran, Duc Tan creators_id: tantd@vnu.edu.vn title: Mô phỏng cảm biến gia tốc MEMS kiểu tụ ispublished: pub subjects: ECE subjects: Electronics subjects: ElectronicsandComputerEngineering divisions: fac_fet date: 2005 full_text_status: public publication: Journal of Science, Vietnam National University, Hanoi refereed: TRUE citation: Tran, Duc Tan (2005) Mô phỏng cảm biến gia tốc MEMS kiểu tụ. Journal of Science, Vietnam National University, Hanoi . document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/94/1/VNU2005.PDF