Bui, Thanh Tung and Van, Dan and Dinh, Xuan Thien and Tibor, Terebessy and Phan, Thanh Hoa (2016) Absolute pressure sensing with bipolar corona discharge: Design, simulation and experimental validation. In: IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 24-28 January 2016, China.
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Abstract
In this paper we present, for the first time, a reliable cost-effective absolute pressure sensor based on a novel bipolar corona system, which monitors pressure by producing both polarities of corona discharge simultaneously. The unique setup increases sensitivity and stability of the sensor. Systematical design study, numerical simulation and experiment of five prototypes acquired consistent results. With sub-microampere operating current, the sensors have temperature-independent sensitivity and good repeatability.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Electronics and Communications > Electronics and Computer Engineering |
| Divisions: | Faculty of Electronics and Telecommunications (FET) |
| Depositing User: | Assoc/Prof Duc Tan Tran |
| Date Deposited: | 31 May 2016 02:26 |
| Last Modified: | 31 May 2016 02:26 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/1581 |
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