Dau, Van Thanh and Yamada, Takeo and Dao, Dzung Viet and Tung, Bui Thanh and Hata, Kenji and Sugiyama, Susumu (2010) Integrated CNTs Thin Film for MEMS Mechanical Sensors. Microelectronics Journal, 41 (12). pp. 860-864. ISSN 0026-2692
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Official URL: http://www.sciencedirect.com/science/article/pii/S...
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | MEMS process |
| Subjects: | Electronics and Communications Electronics and Communications > Electronics and Computer Engineering ISI-indexed journals |
| Divisions: | Faculty of Electronics and Telecommunications (FET) |
| Depositing User: | Prof. Xuan-Tu Tran |
| Date Deposited: | 25 Dec 2013 08:18 |
| Last Modified: | 25 Dec 2013 08:18 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/212 |
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