Robbins, Hannah and Liu, Changqing and Hu, Sijung and Bui, Thanh Tung and Aoyagi, Masahiro (2016) Integration of a microfluidic chip with multiplexed optical fluorescence detector through anisotropic etching of Si using Tetramethylammonium hydroxide (TMAH). In: 2016 6th Electronic System-Integration Technology Conference (ESTC).
Full text not available from this repository.Abstract
Point of care testing (POCT) systems, are widely used to firstly, diagnose and secondly, monitor a number of illnesses and infectious diseases. This research aims to develop the integration between an optical fluorescence system and a microfluidic chip - through the use of advanced manufacturing techniques, such as anisotropic wet etching of Silicon (Si) wafers. The fabricated Si microfluidic chips may integrate into an existing POCT system and provide a potential avenue into multiplexed detection. Zemax and OptiCAD simulation packages were used to confirm the validity of the integrated microfluidic chip design. A testable microfluidic chip, using anisotropic wet etching of a Si wafer by Tetramethylammonium hydroxide (TMAH) etching solution, was fabricated. The process used a mask-less photoresist design, allowing for an easier and cost effective developmental stage in order to provide a proof of concept design. Currently, the TMAH etching process provides the required 370µm etch depth, to house a micro-capillary.
| Item Type: | Conference or Workshop Item (Lecture) |
|---|---|
| Uncontrolled Keywords: | Etching, Fluorescence, Lighting, microfluidics, Optical device fabrication, silicon |
| Subjects: | Electronics and Communications |
| Divisions: | Faculty of Electronics and Telecommunications (FET) |
| Depositing User: | Bùi Thanh Tùng |
| Date Deposited: | 29 Dec 2016 02:48 |
| Last Modified: | 29 Dec 2016 02:48 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/2319 |
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