Nguyen, Thi Yen Mai (2018) Integrated inductor fabrication by monolithic approach. Technical Report. University of Engineering and Technology, Hanoi.
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Abstract
This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.
| Item Type: | Technical Report (Technical Report) |
|---|---|
| Subjects: | Engineering Physics |
| Divisions: | Faculty of Engineering Physics and Nanotechnology (FEPN) |
| Depositing User: | Nguy�n Th |
| Date Deposited: | 06 Jul 2018 02:56 |
| Last Modified: | 06 Jul 2018 02:56 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/3040 |
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