Le, Khac Quynh and Bui, Dinh Tu and Nguyen, Thi Thuy and Dong, Quoc Viet and Nguyen, Huu Duc and Phung, Anh Tuan and Do, Thi Huong Giang
(2019)
Meander anisotropic magnetoresistance bridge geomagnetic sensors.
Journal of Science: Advanced Materials and Devices
.
ISSN 2468-2179
(In Press)
Abstract
Anisotropic magnetoresistive (AMR) sensors have been useful since a long time for specific industrial applications. Their field detection sensitivity can be improved using
magnetic flux concentrators to amplify the magnetic field strength sensed at the sensor. We demonstrate the design and fabrication of a micrometer-size meander AMR bridge sensor with an effective AMR branch length of 150. This sensor geometry exhibits a magnetic sensitivity as high as 1.25 mV/Oe (or 0.45 mV/V/Oe), which is an enhancement by a factor of about 300 compared to that of the corresponding simple AMR thin films. This opens a new challenge in the design and application of geomagnetic devices.
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