Nguyen, Thi Ngoc and Agnus, G. and Matzen, S. and Maroutian, T. and Do, Thi Huong Giang and Lecoeur, P. (2018) Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si. In: The 9th International Workshop on ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY, 7-11 November 2018, Ninh Binh City, Vietnam.
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Abstract
Magnetoelectric (ME)-based sensors have been demonstrated as a promising alternative for the magnetic field detection with high sensitivity on the order of a few tens of nanoteslas [1,2]. To date, most applications focus on laminated composites of using bulk piezoelectric (PZT) materials, which is a critical limit for miniaturizinginto micrometer-sized devices.This work shows the first attempts of a resonator based on multi-ferroic PZT/TbFeCo multilayers, where magnetic signal was very sensed by the shift of the resonant frequency. In this device, TbFeCo layer acts as a micro-actuator, while the PZT thin film as a micro-sensor. In magnetic field range less than 0.2 T, the sensor’s sensitivity as high as 250 Hz/T and 487 Hz/T were achieved in vacuum environments of … and 5 mbar, respectively). A smaller size and lower power consumption provide a significant advantages in terms of micro-ME-sensors for sensing magnetic field.
| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Subjects: | Engineering Physics |
| Divisions: | Faculty of Engineering Physics and Nanotechnology (FEPN) |
| Depositing User: | Dr Giang Do |
| Date Deposited: | 20 Jun 2019 22:40 |
| Last Modified: | 24 Jun 2019 06:45 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/3516 |
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