Wei, J. and Chu, Duc-Trinh and Sarro, PM (2006) Study on 2-lever DRIE for 3D MEMS structures. In: 2006: The SAFE & ProRISC.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Electronics and Communications |
| Divisions: | Faculty of Electronics and Telecommunications (FET) |
| Depositing User: | Prof. Xuan-Tu Tran |
| Date Deposited: | 03 Apr 2015 16:21 |
| Last Modified: | 12 Dec 2017 13:59 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411 |
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