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Study on 2-lever DRIE for 3D MEMS structures

Wei, J. and Chu, Duc-Trinh and Sarro, PM (2006) Study on 2-lever DRIE for 3D MEMS structures. In: 2006: The SAFE & ProRISC.

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Item Type: Conference or Workshop Item (Paper)
Subjects: Electronics and Communications
Divisions: Faculty of Electronics and Telecommunications (FET)
Depositing User: Prof. Xuan-Tu Tran
Date Deposited: 03 Apr 2015 16:21
Last Modified: 12 Dec 2017 13:59

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