Nguyen, Quang Long and Chu, Manh Hoang and Chu, Duc Trinh and Vu, Ngoc Hung (2013) Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining. VNU Journal of Science (95). pp. 177-181. ISSN 0866-8612
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Subjects: | Electronics and Communications |
| Divisions: | Faculty of Electronics and Telecommunications (FET) |
| Depositing User: | Ms. Cam Le Tran Thi |
| Date Deposited: | 21 May 2016 06:14 |
| Last Modified: | 21 May 2016 06:16 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/832 |
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