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Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining

Nguyen, Quang Long and Chu, Manh Hoang and Chu, Duc Trinh and Vu, Ngoc Hung (2013) Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining. VNU Journal of Science (95). pp. 177-181. ISSN 0866-8612

Full text not available from this repository.
Item Type: Article
Subjects: Electronics and Communications
Divisions: Faculty of Electronics and Telecommunications (FET)
Depositing User: Ms. Cam Le Tran Thi
Date Deposited: 21 May 2016 06:14
Last Modified: 21 May 2016 06:16
URI: http://eprints.uet.vnu.edu.vn/eprints/id/eprint/832

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