Dau, Van Thanh and Bui, Thanh Tung and Dinh, Xuan Thien and Dao, Viet Dzung and Yamada, Takeo and Hata, Kenji and Sugiyama, Susumu (2013) A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator. Journal of Micromechanics and Microengineering, 23 (7). 075024.
Full text not available from this repository.
Official URL: http://dx.doi.org/10.1088/0960-1317/23/7/075024
| Item Type: | Article |
|---|---|
| Subjects: | Electronics and Communications Electronics and Communications > Electronics and Computer Engineering |
| Divisions: | Faculty of Electronics and Telecommunications (FET) |
| Depositing User: | Ms. Cam Le Tran Thi |
| Date Deposited: | 30 May 2016 05:42 |
| Last Modified: | 30 May 2016 05:43 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/838 |
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