Tran, Duc Tan (2008) Streamlining the Design of MEMS Devices: An Acceleration Sensor. IEEE Circuits and Systems Magazine . ISSN 1531-636X
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Abstract
A synthesis and optimization process is proposed and applied to the design of a specific MEMS device, namely an acceleration sensor. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). A three degrees-of-freedom piezoresistive acceleration sensor was designed to validate the proposed design flow. During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. In the latter, the piezoresistance effect was employed in sensing the acceleration in three dimensions.
| Item Type: | Article |
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| Subjects: | Electronics and Communications Electronics and Communications > Electronics and Computer Engineering ISI-indexed journals |
| Divisions: | Faculty of Electronics and Telecommunications (FET) |
| Depositing User: | Assoc/Prof Duc Tan Tran |
| Date Deposited: | 12 Nov 2015 07:33 |
| Last Modified: | 12 Nov 2015 07:34 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/85 |
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