Items where Author is "Hata, Kenji"
Group by: Item Type | No Grouping Jump to: Article Number of items: 2. ArticleDau, Van Thanh and Bui, Thanh Tung and Dinh, Xuan Thien and Dao, Viet Dzung and Yamada, Takeo and Hata, Kenji and Sugiyama, Susumu (2013) A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator. Journal of Micromechanics and Microengineering, 23 (7). 075024. Dau, Van Thanh and Yamada, Takeo and Dao, Dzung Viet and Tung, Bui Thanh and Hata, Kenji and Sugiyama, Susumu (2010) Integrated CNTs Thin Film for MEMS Mechanical Sensors. Microelectronics Journal, 41 (12). pp. 860-864. ISSN 0026-2692 |
