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Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle

Wei, J. and Chu, Duc-Trinh and van der Velden, M. and Sarro, PM (2007) Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle. In: The SAFE & Prorisc.

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Item Type: Conference or Workshop Item (Paper)
Subjects: Electronics and Communications
Divisions: Faculty of Electronics and Telecommunications (FET)
Depositing User: Prof. Xuan-Tu Tran
Date Deposited: 06 May 2015 03:13
Last Modified: 12 Dec 2017 13:59
URI: http://eprints.uet.vnu.edu.vn/eprints/id/eprint/412

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