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Items where Author is "Sarro, PM"

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Conference or Workshop Item

Wei, J. and Chu, Duc-Trinh and van der Velden, M. and Sarro, PM (2007) Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle. In: The SAFE & Prorisc.

Wei, J. and Chu, Duc-Trinh and Sarro, PM (2006) Study on 2-lever DRIE for 3D MEMS structures. In: 2006: The SAFE & ProRISC.

This list was generated on Sun Dec 22 03:08:07 2024 +07.
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