Nguyen, Yen Mai and Brunet, Magali (2016) Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer. Journal of Science of HNUE, 61 (9A). pp. 54-59. ISSN 2354-1059
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Abstract
In this work, the technology for fabricating integrated micro-inductors onto silicon is developed. The paper will report the experimental process and technology development to fabricate the micro-inductor on-to silicon substrates with the hybrid integration approach. Copper is used for the fabrication of the conductor windings and vias. Electro-deposition is chosen for depositing copper. Via is electro-deposited to make the connection between bottom tracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or commercial ferrite films.
| Item Type: | Article |
|---|---|
| Subjects: | Engineering Physics |
| Divisions: | Faculty of Engineering Physics and Nanotechnology (FEPN) |
| Depositing User: | Nguy�n Th |
| Date Deposited: | 09 Oct 2018 09:58 |
| Last Modified: | 09 Oct 2018 09:58 |
| URI: | http://eprints.uet.vnu.edu.vn/eprints/id/eprint/3089 |
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