Items where Division is "Faculty of Electronics and Telecommunications (FET)" and Year is 2017

Article

Bui, Duy Hieu and Puschini, Diego and Bacles-Min, Simone and Beigne, Edith and Tran, Xuan Tu (2017) AES datapath optimization strategies for low-power low-energy multi-security-level Internet-of-Thing applications. IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 25 (12). pp. 3281-3290. ISSN 1063-8210

Bui, Thu Hang and Morana, Bruno and Akhnoukh, Atef and Chu, Duc and Sarro, Pasqualina M. (2017) Liquid identification by using a micro-electro-mechanical interdigital transducer. Analyst, 142 . pp. 763-771. ISSN 0003-2654

Bui, ThuHang and Nguyen, Van and Vollebregt, Sten and Morana, Bruno and van Zeijl, Henk and Chu, Duc Trinh and Sarro, Pasqualina M (2017) Effect of droplet shrinking on surface acoustic wave response in microfluidic applications. Applied Surface Science, 426 . pp. 253-261. ISSN 0169-4332

Dang, Nam Khanh and Ahmed, Akram Ben and Tran, Xuan Tu and Okuyama, Yuichi and Abdallah, Abderazek Ben (2017) A Comprehensive Reliability Assessment of Fault-Resilient Network-on-Chip Using Analytical Model. IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 25 (11). pp. 3099-3112. ISSN 1063-8210

Dau, Van Thanh and Dinh, Thien Xuan and Bui, Thanh Tung and Terebessy, Tibor (2017) Corona anemometry using dual pin probe. Sensors and Actuators A: Physical, 257 . pp. 185-193. ISSN 09244247

Gian, Quoc Anh and Tran, Duc Tan and Nguyen, Dinh Chinh and Nhu, Viet Ha and Bui, Tien Dieu (2017) Design and implementation of site-specific rainfall-induced landslide early warning and monitoring system: a case study at Nam Dan landslide (Vietnam). Geomatics, Natural Hazards and Risk . pp. 1-19. ISSN 1947-5713

Gunay, Gokhan and Luu, Manh Ha and Moelker, Adriaan and van Walsum, Theo and Klein, Stefan (2017) Semiautomated registration of pre- and intraoperative CT for image-guided percutaneous liver tumor ablation interventions. Medical Physics, 44 (7). pp. 3718-3725.

Hoang, Van Xiem (2017) A statistical search range adaptation solution for effective frame rate up - conversion. IET Image Processing, 1 (1). pp. 1-10. ISSN 1751-9659

Hoang Nhu, Dong and Nguyen Nam, Hoang and Hoang Trong, Minh and Saba, Takahiko (2017) Femtocell Selection Scheme for Reducing Unnecessary Handover and Enhancing Downlink QoS in Cognitive Femtocell Networks. the Research and Development on Information and Communication Technology Journal, E3 (14). pp. 45-51.

Lam, Sinh Cong and Sandrasegaran, Kumbesan and Ghosal, Pantha (2017) Performance Analysis of Frequency Reuse for PPP Networks in Composite Rayleigh-Lognormal Fading Channel. Wireless Personal Communications . ISSN 0929-6212

Lim, Ying Ying and Goh, Yee Mey and Yoshida, Manabu and Bui, Thanh Tung and Aoyagi, Masahiro and Liu, Changqing (2017) 30-GHz High-Frequency Application of Screen Printed Interconnects on an Organic Substrate. IEEE Transactions on Components, Packaging and Manufacturing Technology, 7 (9). pp. 1506-1515.

Nguyen, Kiem Hung and Le, Van Thanh Vu and Tran, Xuan Tu (2017) A Survey on Reconfigurable System-on-Chips. REV Journal on Electronics and Communications . ISSN 1859-387X

Nguyen, Thi Thanh Van and Le, Vu Ha and Tran, Quang Vinh (2017) A Robust Mobile Robot Navigation System using Neuro-Fuzzy Kalman Filtering and Optimal Fusion of Behavior-based Fuzzy Controllers. REV Journal on Electronics and Communications, 7 (1-2). ISSN 1859-387X (In Press)

Nguyen, Thi Thanh Van and Phung, Manh Duong and Tran, Quang Vinh (2017) Behavior-based Navigation of Mobile Robot in Unknown Environments Using Fuzzy Logic and Multi-Objective Optimization. International Journal of Control and Automation, 10 (1). pp. 349-364. ISSN 2005-4297

Nguyen, Van Thang and Tran, Duc Tan and Chu, Duc Trinh (2017) Design and Simulation of Micromachined Gyroscope based on Finite Element Method. VNU Journal of Science: Mathematics - Physics, 33 (3). ISSN 0866-8612

Nguyen, Viet Dung and Abed-Meraim, Karim and Nguyen, Linh Trung (2017) Second-order optimization based adaptive PARAFAC decomposition of three-way tensors. Digital Signal Processing, 63 . pp. 100-111. ISSN 1051-2004

Nguyen, Viet Dung and Abed-Meraim, Karim and Nguyen, Linh Trung and Weber, Rodolphe (2017) Generalized minimum noise subspace for array processing. IEEE Transactions on Signal Processing, 65 (14). pp. 3789-3802. ISSN 1053-587X

Nguyen Huu, Thuc and Dinh Trieu, Duong and Byeungwoo, Jeon and Hoang Van, Xiem (2017) Performance Evaluation of Frame Loss Error Concealment Solutions for SHVC standard. IEIE Trans. on Smart Processing and Computing . pp. 1-9. ISSN 2287-5255 (In Press)

Pham, Duy Hung and Tran, Quang Vinh and Ngo, Trung Dung (2017) An Online Distributed Boundary Detection and Classification Algorithm for Mobile Sensor Networks. REV Journal on Electronics and Communications, 7 (1-2). pp. 29-36. ISSN 1859-387X

Pham, Van Thanh and Nguyen, Tien Anh and Tran, Duc Nghia and Nguyen, Duc Anh and Tran, Duc Tan (2017) Development of a Real Time Supported Program for Motorbike Drivers Using Smartphone Built-in Sensors. International Journal of Engineering and Technology (IJET), 9 (2). ISSN 0975-4024

Phan, Huu Phu and Nguyen, Minh Ngoc and Nguyen, Ngoc Viet and Chu, Duc Trinh (2017) Analytical modeling of a silicon-polymer electrothermal microactuator. Microsystem Technologies, 23 (1). pp. 101-111. ISSN 1432-1858

Phung, Manh Duong and Quach, Cong Hoang and Dinh, Tran Hiep and Quang, Ha (2017) Enhanced discrete particle swarm optimization path planning for UAV vision-based surface inspection. Automation in Construction, 81 . pp. 25-33. ISSN 0926-5805

Tong, Van Luyen and Truong, Vu Bang Giang (2017) Design of LMS Based Adaptive Beamformer for ULA Antennas. VNU Journal of Computer Science and Communication Engineering, 32 (3). pp. 72-79. ISSN 0866-8612

Tong, Van Luyen and Truong, Vu Bang Giang (2017) Interference Suppression of ULA Antennas by Phase-only Control Using BAT Algorithm. IEEE Antennas and Wireless Propagation Letters . ISSN 1536-1225 (In Press)

Tran, Nhu Chi and Nguyen, Thi Thanh Van and Le, Van Chieu (2017) Phân tích chẩn đoán bệnh mạch vành dựa trên tín hiệu điện tâm đồ. Tạp chí Khoa học ĐHQGHN: Khoa học Tự nhiên và Công nghệ, 33 (3). pp. 1-9. ISSN 2588-1140

Tran, Nhu Chi and Nguyen, Thi Thanh Van and Le, Van Chieu (2017) Phân tích chẩn đoán bệnh mạch vành dựa trên tín hiệu điện tâm đồ. Tạp chí Khoa học ĐHQGHN: Khoa học Tự nhiên và Công nghệ, 33 (3). pp. 1-9. ISSN 2588-1140

Tran, Xuan Tu and Nguyen, Tung and Phan, Hai Phong and Bui, Duy Hieu (2017) ​AXI-NoC: High-Performance Adaptation Unit for ARM Processors in Network-on-Chip Architectures. IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences, E100-A (8). pp. 1650-1660. ISSN 1745-1337

Tran Quang, Huy and Huynh Huu, Tue and Ton That, Long and Tran, Duc Tan (2017) Deterministic compressive sampling for high-quality image reconstruction of ultrasound tomography. BMC Medical Imaging, 17 (1). p. 34. ISSN 1471-2342

Trinh, Anh Vu and Pham, Thi Quynh Trang and Phung, Trung Nghia (2017) ĐIỀU KHIỂN CÔNG SUẤT ĐƯỜNG XUỐNG CHO DUNG LƯỢNG NGƯỜI DÙNG ĐỒNG ĐỀU TRONG HỆ THỐNG MASSIVE MIMO ĐƠN TẾ BÀO. Tạp chí khoa học công nghệ, Đại học Thái nguyên, 173 (13). pp. 117-122. ISSN 1859-2171

Vu, Tuan Anh and Fujishima, Minoru (2017) A 300 GHz CMOS Transmitter Front-End for Ultrahigh-Speed Wireless Communications. International Journal of Electrical and Computer Engineering, 7 (4). pp. 2278-2286. ISSN 2088-8708

Vu, Tuan Anh and Pham, Dinh Tuan and Bach, Gia Duong (2017) High-Efficiency High-Gain 2.4 GHz Class-B Power Amplifiers in 0.13 µm CMOS for Wireless Communications. VNU Journal of Computer Science and Communication Engineering, 33 (1). pp. 1-7. ISSN 0866-8612

Vu Quoc, Tuan and Wu, Meng-Syuan and Bui, Tung Thanh and Chu, Duc Trinh and Jen, Chun-Ping (2017) A compact microfluidic chip with integrated impedance biosensor for protein preconcentration and detection. Biomicrofluidics, 11 (5). 054113. ISSN 1932-1058

Technical Report

Nguyen, Hong-Thinh (2017) RNN on Machine Reading Comprehension Bi-Directional Attention Flow model. Technical Report. University of Engineering and Technology, University of Engineering and Technology.

Conference or Workshop Item

Bui, Thanh Tung and Dinh, Thien Xuan and Tran, Canh Dung and Chu, Duc Trinh and Dau, Van Thanh (2017) Computational and experimental study on ion wind scheme based aerosol sampling for biomedical applications. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Dang, Lam Bao and Dinh, Thien Xuan and Bui, Thanh Tung and Chu, Duc Trinh and Phan, Hoa Thanh and Dau, Van Thanh (2017) Ionic JET flow in a circulatory miniaturized system. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), June 18-22, 2017, Kaohsiung, Taiwan.

Dinh, Thi Thai Mai and Nguyen, Quoc Tuan and Sandrasegaran, Kumbesan (2017) A closed-form of Cooperative Detection Probability using EGC-Based Soft Decision under Suzuki Fading. In: 11th International Conference on Signal Processing and Communication Systems, 13-15/12/2017, Gold Coast, Queensland, Australia. (In Press)

Dinh, Van Nam and Nguyen, Kiem Hung and Pham, Minh Trien and Tran, Xuan Tu (2017) An IDPSO Algorithm-based Application Mapping Method for Network-on-Chips. In: The 7th International Conference on Integrated Circuits, Design, and Verification (ICDV), 5-6 October 2017, Hanoi, Vietnam.

Do, Quang Loc and Bui, Thanh Tung and Vu, Quoc Tuan and Pham, Thanh Luan and Tran, Thi Thuy Ha and Dau, Thanh Van and Jen, Chun Ping and Chu, Duc Trinh (2017) Dielectrophoresis enrichment with built-in capacitive sensor microfluidic platform for tumor rare cell detection. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan.

Do, Quang Loc and Nguyen, Thu Trang and Bui, Thanh Tung and Tran, Thi Thuy Ha and Le, Van Chieu and Vo, Thi Thuong Lan and Hoang, Thi My Nhung and Jen, Chun-Ping and Chu, Duc Trinh (2017) Circular electrodes stepping manipulation platform for A549 cancer cell detection. In: The 6th International Workshop on Nanotechnology and Application (IWNA), 08-11 November 2017, Phan Thiet, Vietnam.

Gian, Quoc Anh and Tran, Duc Tan and Nguyen, Dinh Chinh and Bui, Tien Dieu (2017) Flexible Configuration of Wireless Sensor Network for Monitoring of Rainfall-Induced Landslide. In: International Conference on Earth Observations & Natural Hazards 2017 (ICEO&NH 2017), 21-26, November 2017, Ha noi, Viet nam.

Gunay, Gokhan and van der Voort, Sebastian and Luu, Manh Ha and Moelker, Adriaan and Klein, Stefan (2017) Parameter Sensitivity Analysis in Medical Image Registration Algorithms Using Polynomial Chaos Expansions. In: International Conference on Medical Image Computing and Computer-Assisted Intervention 2017.

Ho, Huy Hung and Nguyen, Ngoc Sinh and Bui, Duy Hieu and Tran, Xuan Tu (2017) Accurate and Low Complex Cell Histogram Generation by Bypass the Gradient of Pixel Computation. In: The 4th NAFOSTED Conference on Information and Computer Science (NICS), 24-25 November 2017, Hanoi, Vietnam.

Hoang, Anh Quy and Pham, Minh Trien (2017) Swarm Intelligence-Based Approach for Macroscopic Scale Odor Source Localization Using Multi-robot System. In: International Conference on Advances in Information and Communication Technology, 12-13, Dec., 2016, Vietnam.

Hoang, Manh Kha and Duong, Thi Hang and Vu, Trung Kien and Trinh, Anh Vu (2017) Enhancing WiFi based Indoor Positioning by Modeling Measurement Data with GMM. In: International Conference on Advanced Technologies for Communications, 18-20, October, 2017, Quy Nhon, Viet Nam. (In Press)

Hoang, Van Truong and Singh, Ansu Man and Phung, Manh Duong and Ha, Quang (2017) Adaptive Second-order Sliding Mode Control of UAVs for Civil Applications. In: The 34th International Symposium on Automation and Robotics in Construction (ISARC), July 2017, Taipei, Taiwan.

Hoang, Van Xiem and Dao, Thi Hue Le and Dinh, Trieu Duong (2017) HEVC based Distributed Scalable Video Coding for Surveillance Visual System. In: 2017 4th NAFOSTED Conference on Information and Computer Science (NICS 2017), 24-25 November 2017, Hanoi, Vietnam.

Hoang, Van Xiem and Thao, Nguyen Thi Huong (2017) An Online SVM based Side Information Creation for Efficient Distributed Scalable Video Coding. In: 9th International Conference on Advanced Technologies for Communications (ATC), 12-14 October 2016, Hanoi, Vietnam.

Le, Trung Thanh and Nguyen, Linh Trung and Nguyen, Viet Dung and Abed-Meraim, Karim (2017) A New Windowed Graph Fourier Transform. In: The 4th NAFOSTED Conference on Information and Computer Science (NICS), 24-25 November 2017, Hanoi, Vietnam.

Le, Trung Thanh and Nguyen, Thi Anh Dao and Nguyen, Linh Trung and Le, Vu Ha (2017) On the overall ROC of multistage systems. In: 2017 International Conference on Advanced Technologies for Communications (ATC), 18-20 October 2017, Quy Nhon, Viet Nam.

Le, Van Luan and Nguyen, Nhu Cuong and Nguyen, Ngoc An and Bui, Thanh Tung and Dau, Van Thanh and Chu, Duc Trinh (2017) A valveless micropump based on additive fabrication technology. In: The 6th International Workshop on Nanotechnology and Application - IWNA 2017, 08 -11 November 2017, Phan Thiet, Vietnam.

Luong, Quang Ha and Nguyen, Manh Cuong and Tran, Duc Tan (2017) Detection and Classification of Soft Tissues using Complex Shear Modulus Estimation and Decision Tree Algorithm. In: International Conference on Advanced Technologies for Communications, 18-20 October 2017, Quy Nhon, Viet Nam.

Luong, Quang Hai and Nguyen, Manh Cuong and Tran, Duc Tan (2017) A frequency dependent investigation of complex shear modulus estimation. In: International Conference on Advances in Information and Communication Technology, 12-13, Dec., 2016, Vietnam.

Nguyen, Ngoc Tan and Nguyen, Quoc Tuan and Nguyen, Nam Hoang and Sandrasegaran, Kumbesan (2017) A Color Space Exploration in Optical Spatial Modulation. In: TENCON 2017, 5-8 November 2017, Penang, Malaysia.

Nguyen, Quang Linh and Tran, Dinh Lam and Bui, Duy Hieu and Mai, Duc Tho and Tran, Xuan Tu (2017) Efficient Binary Arithmetic Encoder for HEVCwith Multiple Bypass Bin Processing. In: The 7th International Conference on Integrated Circuits, Design, and Verification (ICDV), 5-6 October 2017, Hanoi, Vietnam.

Nguyen, Thi Hoai Thu and Le, Trung Thanh and Chu, Thi Phuong Dung and Nguyen, Linh Trung and Le, Vu Ha (2017) Multi-source Data Analysis for Bike Sharing Systems. In: 2017 International Conference on Advanced Technologies for Communications (ATC), 18-20 October 2017, Quy Nhon, Viet Nam.

Nguyen, Thi Thanh Van and Tran, Nhu Chi and Bui, Thanh Tung and Chu, Duc Trinh and Sherpa, Ang and Lenning, Michael and Marsh, Paul and Garzon, Nick and Hofsteen, Peter and Cao, Hung and Yang, Jingchun and Xu, Xiaolei (2017) Novel Apparatus for Simultaneous Monitoring of Electrocardiogram in Awake Zebrafish. In: IEEE Sensors 2017, 30 October 2017 - 1 November 2017, Glasgow, Scotland, UK.

Nguyen, Xuan Bac and Nguyen, Nam Hoang and Saba, Takahiko (2017) Channel Reallocation for Reducing Power Consumption in Femtocell Mobile Networks. In: The 4th NAFOSTED Conference on Information and Computer Science (NICS), 24-25 November 2017, Hanoi, Vietnam. (In Press)

Nguyen Xuan, Tien and Nguyen Tien, Anh and Nguyen Van, Toan and Vuong Hai, Tu and Tran, Duc Tan (2017) Ứng dụng bộ lọc tối ưu nhằm nâng cao độ chính xác trong định vị thiết bị khảo sát trên biển. In: Hội thảo Thông tin và Định vị trên biển, Dec. 29, 2017, Ha noi, Viet nam.

Pham, Van Thanh and Nguyen, Thi Anh Dao and Tran, Thi Thuy Quynh and Chu, Thi Phuong Dung and Tran, Duc Tan (2017) A Novel Step Counter Supporting For Indoor Positioning Based On Inertial Measurement Unit. In: The 7th International Conference on Integrated Circuits, Design, and Verification (ICDV 2017), 5-6, Oct, 2017, Ha noi, Viet nam.

Pham Van, Thanh and Dang Nhu, Dinh and Nguyen Duc, Anh and Nguyen Tien, Anh and Chu Duc, Hoang and Tran, Duc Tan (2017) Automatic removal of EOG artifacts using SOBI algorithm combined with intelligent source identification technique. In: International Conference on Advanced Technologies for Communications, Oct., 18-20, 2017, Quy Nhon, Viet Nam.

Pham Van, Thanh and Nguyen Thi Huyen, Nga and Le Thi Thu, Ha and Do Van, Lam and Nguyen, Dinh Chinh and Tran, Duc Tan (2017) Development of a Real-Time Supported System for Firefighters in Emergency Cases. In: International Conference on the Development of Biomedical Engineering in Vietnam, 2016, Ho chi minh.

Phan, Hai Phong and Tran, Xuan Tu and Yoneda, Tomohiro (2017) Power Consumption Estimation using VNOC2.0 Simulator for a Fuzzy-Logic based Low Power Network-on-Chip. In: The 2017 IEEE International Conference on Integrated Circuit Design and Technology (IEEE ICICDT), 23-25 May 2017, Texas, USA.

Phi, Cong Huy and Perry, Stuart and Trinh, Anh Vu and Hoang, Van Xiem (2017) Joint Exploration Model based Light Field Image Coding: A Comparative Study. In: 2017 4th NAFOSTED Conference on Information and Computer Science (NICS 2017), 24-25, Nov, Hanoi city, Vietnam.

Phung, Manh Duong and Hoang, Van Truong and Dinh, Tran Hiep and Ha, Quang (2017) Automatic Crack Detection in Built Infrastructure Using Unmanned Aerial Vehicles. In: The 34th International Symposium on Automation and Robotics in Construction (ISARC), July 2017, Taipei, Taiwan.

Phung, Manh Duong and Villefromoy, Michel and Ha, Quang (2017) Management of solar energy in microgrids using IoT-based dependable control. In: 2017 20th International Conference on Electrical Machines and Systems (ICEMS), 11-14 Aug 2017, Sydney, Australia.

Sherpa, Ang and Schossow, Daniel and Lenning, Michael and Marsh, Paul and Garzon, Nick and Hofsteen, Peter and Cao, Hung and Yang, Jingchun and Xu, Xiaolei and Nguyen, Thi Thanh Van and Tran, Nhu Chi and Bui, Thanh Tung and Chu, Duc Trinh (2017) Novel Apparatus for Simultaneous Monitoring of Electrocardiogram in Awake Zebrafish. In: IEEE Sensors 2017, October 30- November 1 2017, Glasgow, UK.

Tran, Cao Quyen (2017) Developing a Symmetrical Phased Array Antenna with Low Complexity. In: 2017 7th International conference on integrated circuit, design and verification (ICDV), 5-6 October 2017, Hanoi, Vietnam.

Tran, Thi Thuy Ha and Do, Do Quang and Dau, Van Thanh and Nguyen, Thi Kim Ngan and Le, Van Chieu and Aoyagi, Masahiro and Kikuchi, Katsuya and Bui, Thanh Tung (2017) Coplanar differential capacitively coupled contactless conductivity detection (CD-C4D) sensor for micro object inside fluidic flow recognization. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Tran, Van Ngoc and Bui, Thanh Tung and Dinh, Xuan Thien and Terebessy, Tibor and Chu, Duc Trinh and Dau, Van Thanh (2017) A symmetrically arranged electrodes for corona discharge anemometry. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Tran Quang, Huy and Nguyen The, Lam and Tran, DucTan (2017) Quy trình kết hợp đa tần số hiệu quả trong việc nâng cao chất lượng khôi phục ảnh siêu âm cắt lớp. In: Hội nghị Quốc gia lần thứ XX về Điện tử, Truyền thông và Công nghệ Thông tin, 14-15/12/2017, Ho Chi Minh. (In Press)

Vu, Quoc Tuan and Wu, Meng-Syuan and Bui, Thanh Tung and Chu, Duc Trinh and Jen, Chun-Ping (2017) A compact exclusion-enrichment microfluidic chip with integrated impedance biosensor for lowconcentration protein detection. In: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Vu, Tuan Anh and Takano, Kyoya and Fujishima, Minoru (2017) A 300 GHz single varactor doubler in 40 nm CMOS. In: 2017 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT), 30 Aug - 1 Sept 2017, Seoul, Korea.

Vu, Xuan Thang and Trinh, Anh Vu and Chatzinotas, Symeon and Ottersten, Björn (2017) Spectral-Efficient Model for Multiuser Massive MIMO: Exploiting User Velocity. In: IEEE international Conference on Communications, May, 21-25, Paris, France.

Book

Tran, Xuan Tu and Phan, Xuan Hieu and Tran, Duc Tan and Pham, Manh Thang and Pham, Duc Thang and Pham, Bao Son (2017) Annual Scientific Report 2017 (ASR 2017). VNU-UET, Hanoi, Vietnam.

Thesis

Le, Van Thanh Vu (2017) Reconfigurable Network-on-Chip Solution for Complex Systems. PhD thesis, VNU University of Engineering and Technology.

Patent

National Institute Of Advanced Industrial Science And Technology (2017) Method of manufacturing semiconductor device and semiconductor device manufacturing apparatus. US9627347 B2.

US20170200644A1 (2017) Through electrode, manufacturing method thereof, and semiconductor device and manufacturing method thereof. US9818645B2.